X-ray photoelectron spectroscopy-Auger electron spectroscopy (XPS/AES) ESCALAB 250 Thermo Fisher Scientific
X-RAY PHOTOELECTRON SPECTROSCOPY:
Zoom microscope with field of view of approximately 500 ?m – 3 mm
Monochromatic X-ray Source:
Microfocused 0.5 m Rowland circle Al Ka source
Electron source operating voltage is 15 keV nominal
Aluminum-coated water cooled anode is mounted on linear drive mechanism to provide at least 20 operating positions before anode replacement is required.
Twin toroidal quartz crystals are used as monochromator, each independently adjustable with three degrees of freedom
Ultimate energy resolution < 0.45 eV
Ultimate spatial resolution < 20 microns
Electron energy analyser:
Hemispherical analyser of 150 mm mean radius full 180 degree
Continuously adjustable from 8 mm to less than 20 ?m analysis area
CHARGE NEUTRALISATION SOURCES:
Multi-mode electrostatic flood source:
Electron beam charge compensation
Argon ion flood compensation
Field emission electron FEG 1000 source with field replaceable Schottky emitter is used.
Point, line, raster, variable rate scan
ION SOURCE FOR SPECIMEN CLEANING AND DEPTH PROFILING
Differentially pumped electron impact EX05 ion gun with dual electrostatic lenses
Gas used is Ar Maximum Ar beam current >5 ?A at 4 keV
SPECIMEN STAGE MOVING
Motorised high precision specimen manipulator with X,Y, Z and tilt motions. Stage travel in X direction 50 mm, in Y 20 mm and in Z 12 mm, with 5 ?m resolutions.
The stage tilt may be obtained in the range -90° to +60° from horizontal.
Remote stage control is by operation of trackerball or joystick on control unit. Stage automation giving full automation of all four motions with provision for storage of multiple sets of specimen co-ordinates, and controlled by the Avantage datasystem.
In fully degassed, system the following ultimate pressures are achieved:
Analysis chamber with titanium sublimation pump 1*10-9 mbar
Fast entry chamber 2*10-8 mbar
The Avantage data system allows processing and analysis of all types of data including spectra, linescans, profiles and images in the same processing document.