Equipment Specifications (as given by manufacturer)
Scanning Electron Microscope – Quanta 200, FEI
Electron optics
• High-performance thermal emission- SEM column with dual-anode source emission geometry, fixed objective aperture and through-the-lens differential pumping
• Filament lifetime > 100 hours
Resolution
- 3.0nm at 30kV (SE)
- 4.0nm at 30kV (BSE)
- 10nm at 3kV (SE)
• Accelerating voltage: 200V – 30kV
• Probe current: up to 2μA – continuously adjustable
Detectors
• Everhardt-Thornley SED
• Low-vacuum SED (LFD)
• Gaseous SED (GSED)
• Solid-state BSED
• Gaseous analytical BSED (GAD)
Vacuum system
• 1x 240 l/s TMP, 1x PVP
• Patented through-the-lens differential pumping
• Beam gas path length: 10 or 2 mm
Chamber
• 284mm left to right
• 10mm analytical WD
• 8 ports
• EDX take-off angle: 35°
4-axis motorized stage
• Eucentric goniometer stage
• X,Y = 50mm
• Z = 50mm (25mm motorized)
• T = -15° to +75° (manual)
• R = 360° continuous
• Repeatability: 2μm
System control
• 32-bit graphical user interface with Windows XP, keyboard, optical mouse
• Image display: 19-inch LCD, SVGA 1280 x 1024
• Single frame or 4-quadrant image display
• 4-quadrant live